Aisin SA-22TJ-01S Cryopump低温泵

Aisin Cryopump SA-22TJ-01S

Aisin's cryopumpsconsist of a separate compressor unit and a GM refrigerator which has an improved valve mechanism.

日本爱信低温泵系统包括两个独立分开的压缩机和GM原理制冷机。

 High Productivity 高效

High Productivity has been achieved by developing a high-output refrigerator with a long regeneration cycle, high throughput operation, and reduced cool-down time.

 通过研发出来的高效制冷机，实现了高效：很长的再生周期，高产量，较短的降温时间。

 Simple Maintenance维护简便

 Maintenance has been simplified. Valves do not require adjustment. In addition to valves, some components do not require adjustment.

 维修简化。（进出气）阀不需要调整，其它一些组件也是如此（编者注：比如深度）。

 High-Performance Compressor Unit高效（氦气）压缩机

 The cryopump utilizes a high-capacity compressor and a high-performance oil separator to acheive long-term stable refrigeration output and long life for the adsorber.低温泵利用高效（氦气）压缩机和高效油气分离器，获得了持久稳定的制冷（功率）输出，同时也提高了吸附器的使用期限。

 High Reliability高可靠性

 Stable discharge characteristics have been achieved by using highly reliable seals, drive units, and valve mechanisms and by optimizing the panel shape.通过应用超高稳定的密封圈（编者注：尤其是一级蓄冷器密封），驱动单元，“进出气”阀机构，和优化面板形状，获得了稳定的排气（或者说“抽气”）性能。

 Low-Vibration Pump Unit低振动

Uses a small, special three-phase motor, reduces vibrations to 1/40 of the convectional poduct( two-phases motor) .应用了小型三相电机，其振动只有传统电机（两相电机）的1/40。（编者注：三相电机是各个厂家的发展趋势，显著优势是振动小）。

Applications应用

Ion implanter for semiconductors, liquid crystal, vapor deposition equipment and so on. 半导体的离子注入、液晶、气相沉积（编者注：蒸发或溅射）。